Semiconductor "Front End"
Vacuum Compatible Stages for Wafer Inspection
Anorad is the undisputed leader in vacuum positioning applications. Our ultra-precision systems are designed from the bottom up to meet the vacuum compatible, sub-micron positioning requirements of semiconductor equipment manufacturers. Anorad products are routinely employed in many facets of the industry, including electron-beam lithography, scanning electron microscopy, and focused ion beam diagnostics.
Scanning Electron Beam Inspection Stage
Open frame construction allows double-sided work piece access for inspection of wafers and X-ray masks
- Dual vacuum compatible brushless linear servo motor
drive enables scanning speed position error of <0.2µm - High-precision stage construction with crossed roller
bearings enables defect detection as small as 0.005µm - Constructed using nonmagnetic and vacuum
compatible materials for operation to 10 -7 Torr - Magnetic field variation at E-beam/wafer
intersection of <1 milligauss
Reticle Inspection / Defect Review
- XY vacuum compatible stage for 300 mm SEM defect review
- Piezoelectric locking system for nanometer-level stability
- Rigid aluminum construction minimizes Abbe error
- Glass scale encoders and interpolators for 1 nm resolution
Focused Ion Beam Inspection
- Cost effective XY Theta 300mm positioning solutions using vacuum prepped standard stages
- Piezo ceramic linear motors offer zero-dither nanometer-level position stability
- Teflon jacketed cables, fluxless soldered connectors and low vapor pressure lubricant cleanly operate to 10 -7 Torr
- Vented hardware, air cavities free, and non-porous electroless nickel finish enable rapid pump down
- Recirculating element bearings allow compact profile and small footprint
PCLM Stages for High Vacuum
- Nonmagnetic piezo actuated 6-axis positioning stage
- Integral tip and tilt wafer leveling axes for ion beam lithography
- Carefully selected surface finishes, hardware and materials for rapid pump- down times