Vacuum Compatible Positioning Systems
Anorad is the undisputed leader in vacuum positioning applications. These ultra-precision systems are specially designed from the bottom up to meet the vacuum compatible, sub-micron positioning requirements of semiconductor equipment manufacturers. Anorad products are widely employed in many facets of the industry, including electron-beam lithography, scanning electron microscopy, and focused ion beam diagnostics.
Many standard Anorad stages are available in a "vacuum prepped" version. We also routinely design and build vacuum compatible precision motion platforms to suit exact OEM requirements.
Anorad is well versed in:
- Material selection to manage outgassing for contamination control and rapid pump down time
- Material compatibility analysis to avoid end product or process interaction
- Low stray magnetic fields (<1milligauss) through material selection and shielding techniques
- Thermal management including motor and electronics cooling
- Proper selection of surface finishes, lubricants, component and hardware venting
- Complex mechanics to accommodate unique application configurations
- Cleanroom assembly and bake out
- Special packaging, cleaning, and handling procedures
Moving to 300mm? Copper? 0.13µm or less? Anorad can get you there faster.
Our vacuum positioning systems are utilized in semiconductor manufacturing applications such as:- E-beam inspection
- Scanning electron microscopy
- Focused ion beam diagnostics
- Electron-beam lithography
- Inline critical dimension metrology
- Photomask patterning
- Defect review
- Patterned and unpatterned surface inspection
For 30 years, Anorad has been providing vacuum compatible positioning stages to OEMs in the semiconductor industry.
From building block positioning stages to complete custom engineered-to-order systems, Anorad can solve your most demanding vacuum based applications.Anorad offers:
- Custom designed single-axis stages, multi-axis platforms, and turnkey systems
- Software for motion, I/O, and operator interface
- Active vibration isolation
- Program management from concept to prototype to volume production
- Rapid prototyping capabilities with full documentation and training
- Complete analytical engineering capabilities
- On-site technical services