Z-Wedge Precision Vertical Lift Stage
- Compact footprint easily integrates into multi-axis positioning systems
- Ballscrew drive provides high stiffness and excellent stability
- Glass scale encoder for ultra-high resolution feedback
- Repeatable to ±0.5 um
- Rugged aluminum construction for lightweight and great value
- Cross roller linear bearings provide smooth motion and maximize rigidity
- Maximum travel 12 mm
- Ideal for:
- Autofocus stages
- Wafer scanning
- 360 degree access to workpiece
- Application optimized designs possible
A precision ground ballscrew, mounted in rigid support bearings, provides extremely repeatable position control. A stiff metallic bellows-type coupling attaches the ballscrew to the drive motor to minimize angular deflections and maximize system response. The vertical lift stage rides on a set of high precision, preloaded ultra-smooth crossed roller bearing ways to permit extremely fine mechanical resolution. Resolution is further enhanced by collecting feedback information from a highly stable, glass scale encoder with a signal interpolator that provides nanometer level electrical resolution. Pure vertical motion is assured by a second set of ground linear guides along the Z-axis.
The net result of all this engineering expertise is a compact, rigid yet lightweight stage that offers excellent stability, resolution and speed control. Rapid move and settle times as well as very tight constant velocity control are all readily achieved using the Anorad Z-Wedge vertical lift stage.
Specifications
| Positioning Capabilities | Performance Specification | ||
|---|---|---|---|
| Travel | 12 mm (other travel limits available) | ||
| Linear Accuracy | 2.0 µm (3 mm travel) | ||
| Repeatability | 0.5 µm | ||
| Electrical Resolution | 1 nm (with 4096 x interpolation) | ||
| Minimum Step Size | 50 nm | ||
| Maximum Velocity 1 | 12 mm/s | ||
| Maximum Load Capacity | 20 kg | ||
| Straightness/Flatness | ± 2 µm (full travel) | ||
| Pitch/Yaw Accuracy | ± 5.4 arc sec/mm | ||
| Stage Weight | ~ 5 kg | ||
| Move & Settle Times 1 (3mm) |
Move (µm) 0.1 1.0 10 |
Settle (µm) ± 0.025 ± 0.1 ± 0.1 |
Time (ms) 25 40 70 |
| Constant Velocity Performance 1 (3mm) |
Speed (µm/s) 2.5 10 25 30 |
Variance (%) 2 0.6 0.3 0.3 |
|
1 Maximum acceleration and speed are a function of customer payload and move profile.
Outline Drawing (3mm travel version shown - C615973)
Dimensions(mm)
