WKY XY Positioning Stage
- Integrated XY construction lowers profile and reduces moving mass
- Widely spaced precision ground crossed roller bearings
- Zero cog brushless linear servo motors for ultra high precision
- High accuracy optical encoder with resolution to 0.1µm
- Travels available from 50 mm x 50 mm to 300 mm x 300 mm
- Ideal for:
- Laser Direct Write
- 2 D Visual Inspection
- Laser Diamond Cutting
- Reticle Inspection
The WKY XY Stage delivers extremely smooth and accurate two-dimensional motion. The three-layered design is machined from high-strength aluminum alloy for light weight and rigidity. The middle section serves as both the moving carriage of the lower axis and as the sliding base of the upper axis. This lowers overall mass to allow higher acceleration and increased throughput. The compact, low profile design also reduces angular errors to enable extremely high accuracy and repeatability.
The WKY XY Stage is available in an "open frame" configuration option. This version has an aperture through the entire system to allow visual access to both sides of a workpiece. This is ideal for bottom illumination and can also be used in automated optical inspection (AOI) applications.
The WKY XY Stage incorporates several high precision components that contribute to its dynamic performance. It is actuated by Anorad's patented LEM epoxy core linear servomotors. The zero cogging motors are sinusoidally commutated to minimize velocity ripple in scanning applications. The motors are also neatly mounted into the aluminum stages to reduce system footprint and overall height. Precision ground cross roller bearing ways also help to enhance the stage's performance. They are widely spaced to create a highly stable, stiff platform and feature PACTT (patented anti-creep technology) to prevent retainer migration, reduce friction, and improve accuracy of motion.
Specifications
| Positioning Capabilities | Performance Specifications | |||||
|---|---|---|---|---|---|---|
| Accuracy 1 | ||||||
| X-axis (lower) | ± 2 µm + 1 µm/50 mm | |||||
| Y-axis (upper) | ± 2 µm + 1.5 µm/50 mm | |||||
Repeatability 2 (3  bi-directional) |
± 1 µm (with resolution 0.5 µm or better) | |||||
| Straightness | ± 3 µm + 1 µm/50 mm | |||||
| Flatness | ||||||
| X-axis | ± 4 µm + 1 µm/50 mm | |||||
| Y-axis | ± 4 µm + 2 µm/50 mm | |||||
| Roll, pitch, yaw | ||||||
| X-axis | ± 4 arc sec + 1.5 arc sec/50 mm | |||||
| Y-axis | ± 4 arc sec + 3 arc sec/50 mm | |||||
| Orthogonality | ± 10 arc sec | |||||
| Dynamic Performance | 50x50 | 100x100 | 150x150 | 200x200 | 250x250 | 300x300 |
| Acceleration 3 (m/sec 2 ) | ||||||
| WKY-C | ||||||
| X-axis | 3.5 | 3.5 | 2.6 | 2.0 | 1.6 | 2.2 |
| Y-axis | 7.5 | 7.5 | 5.5 | 4.3 | 3.4 | 4.6 |
| WKY-O | ||||||
| X-axis | 2.1 | 1.7 | 1.4 | 1.2 | 2.1 | 1.8 |
| Y-axis | 4.6 | 3.8 | 3.3 | 2.9 | 5.1 | 4.6 |
| Maximum Velocity 4 (mm/s) | ||||||
| X-axis | 300 | 300 | 400 | 400 | 500 | 400 |
| Y-axis | 450 | 500 | 600 | 600 | 750 | 750 |
| Load capacity (kg) | 6 | 8 | 10 | 12 | 15 | 20 |
| Weight (kg) | ||||||
| WKY-C | 23 | 23 | 31 | 41 | 51 | 76 |
| WKY-O | 39 | 49 | 60 | 70 | 82 | 95 |
- Including bi-directional repeatability
- Specifications measured without additional load and 50 mm above the slide and per axis
- Load dependent; assuming customer load < 5 kg
- With MERS-50D50 speed is limited to 400 mm/s
| WKY Construction | Mechanical Features | ||||
|---|---|---|---|---|---|
| Base and slide materials | Precision machined black anodized aluminum | ||||
| Bearings | Precision ground crossed roller bearing guideways with PACT | ||||
| Drive mechanism | Anorad's patented LEM brushless, epoxy core, sinusoidal linear servo motor | ||||
| Encoder | 50 lines/mm reflective scale linear encoder with either sinusoidal output signals or TTL encoder pulses | ||||
| Readhead | MERS-50 | -D1 | -D5 | -D10 | -D50 |
| Resolution (µm) | Analog (sin/cos) | 5.0 | 1.0 | 0.5 | 0.1 |
| Limits | (2) magnetic, fixed at factory; sensor integral to encoder readhead | ||||
| Home | (1) magnetic, fixed at factory; sensor integral to encoder | ||||
| Cables/Connectors | High flex cable internal for encoder, motor and limits/home. Sub-D type connectors on bulkhead |
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Outline Drawing
WKY-C Series (Closed table top)
Dimensions (mm)
| Travel | A | B | C | D | E | F | G | K | L |
| 50x50 | 260 | 220 | 150 | 20 | 55 | 55 | 80 | 150 | 100 |
| 100x100 | 260 | 220 | 150 | 20 | 55 | 55 | 80 | 150 | 100 |
| 150x150 | 310 | 200 | 200 | 55 | 55 | 55 | 105 | 200 | 100 |
| 200x200 | 360 | 250 | 250 | 55 | 55 | 55 | 130 | 250 | 100 |
| 250x250 | 410 | 300 | 300 | 55 | 55 | 55 | 155 | 300 | 100 |
| 300x300 | 510 | 400 | 400 | 55 | 55 | 80 | 205 | 350 | 100 |
For detailed dimensional specifications, please contact factory for certified drawing.
<h3>WKY-O Series (Open table top)
Dimensions (mm)
| Travel | A | B | C | D | E | F | G |
| 50x50 | 360 | 320 | 250 | 20 | 55 | 150 | 75 |
| 100x100 | 410 | 300 | 300 | 55 | 55 | 175 | 100 |
| 150x150 | 460 | 350 | 350 | 55 | 55 | 200 | 125 |
| 200x200 | 510 | 400 | 400 | 55 | 55 | 225 | 150 |
| 250x250 | 560 | 450 | 450 | 55 | 55 | 250 | 175 |
| 300x300 | 610 | 500 | 500 | 55 | 55 | 275 | 200 |
For detailed dimensional specifications, please contact factory for certified drawing.