LE Vacuum Compatible Linear Motor

• Low outgassing design for high vacuum operation to 10 -7 torr
• High temperature insulation system
• Zero-cogging and zero-magnetic attraction ironless coil design
• Proprietary material selection and manufacturing processes
• Ideal for:
  • E-beam applications
  • Semiconductor processing

Anorad's patented LE type linear motors are designed for high vacuum operation. They employ special thermal management features and low outgassing materials to ensure compatibility with semiconductor processing applications. Anorad has the industry's largest selection of linear motors for recision positioning equipment.

The LE motor's zero-cogging, zero-magnetic attraction design minimizes variation in actuation force to deliver high position stability and tight constant velocity control for inspection applications.

The LE linear servo is manufactured using proprietary process that include an encapsulation method that fills all voids in the coil assembly to prevent desorption. The motor assembly has no blind holes, all exposed surfaces have an extremely smooth surface finish and the motor magnets are plated with a non-porous coating to assure high vacuum compatibility.

Anorad's motor manufacturing expertise also covers engineered-to-order linear motor designs with extremely low stray magnetic field designs in addition to high temperature and other high vacuum compatible models.

Specifications

LE-S Specifications	Sinusoidal Commutation		LEM-S-4-S-NC	LEMS4NVH	LEB-S-6-S-NC	LEBS6NVH
Performance Parameters	Symbol	Units In Free Air @25ºC	On Heatsink	In Vacuum In Free Air @25ºC	On Heatsink	In Vacuum
Continuous Force (Coil @125ºC)	F cTmax	N (lb f )	96 (22)	48 (11)	130.0 (42)	135.14 (30.38)
Peak Force 2	F p	N (lb f )	302 (68)	151 (34)	716.0 (161)	441.40 (99.23)
Thermal Resistance	R th	ºC/W	0.74	2.86	0.60	1.37
Max Power Dissipation	P cTmax	W	136	35	166.0	36.5
Electrical Time Constant	t e	msec	0.5	0.5	0.5	0.5
Max Coil Temp	T max	ºC	125	125	125	125
Force Constant	K F	N/A pk (lb f /A pk )	22.2 (5)	22.2 (5)	59.0 (13.3)	90.08 (20.25)
Back EMF Constant p-p	K e	V p /m/s (V p /in/s)	26.3 (0.67)	26.3 (0.67)	69.7 (1.77)	75.20 (1.91)
Peak Current (1 sec)	I p	A pk	13.6	6.8	10.1	4.9
Continuous Current (Coil @125ºC)	I cTmax	A pk	4.3	2.15	3.2	1.5
Resistance p-p 3 @25ºC	R 25	ohm	7.06	7.06	15.6	15.6
Resistance p-p 3 @25ºC	R 125	ohm	9.78	9.78	21.61	21.61
Inductance p-p 3	L	mH	3.6	3.6	8.4	8.4
Mechanical Parameters
Magnetic Attraction	F a	N (lb f )	0 (0)	0 (0)	0 (0)	0 (0)
Coil Mass 5	M c	kg (lb m )	0.6 (1.4)	0.6 (1.4)	1.1 (2.4)	1.1 (2.4)
Magnetic Channel Mass	M n	(lb/in)	(0.29)	(0.29)	(0.64)	(0.64)

Notes: Motor performance specifications are with sinusoidal commutation.

1. All winding parameters listed are measured line-to-line (phase-to-phase)
2. All currents and voltages listed are measured 0-peak of the sine wave unless noted rms.
3. With coil assembly mounted on a 100 sqin x 1" thick heatsink and coil is in a magnet channel.
4. Data for motor operating in 10-5 vacuum at 25ºC on 100 sqin heatsink.
5. All specifications are ±10%.