Engineered-to-Order Systems

Precision Positioning Stages

Multi-axis

Fast-Turn Gate Array Prototyping

• Coplanar XY air bearing system
• Compact design with 50 mm x 50 mm travel
• Rigid ceramic beams with lapped granite base
• Interferometric encoders with 2 nanometer resolution
• Zero-cogging linear motors
• Class 10 cleanroom compatible

Bumped Wafer Inspection System

• Cost effective hybrid bearing design
• Air bearing scan axis and mechanical bearing step axis
• Engineered ceramic matrix composite beam for maximum stiffness
• SEMI S2, S8, and CE compliant
• Class 100 cleanroom compatible

Wafer Stepper Lithography System

• Dual, parallel, nested coplanar XY air bearing stages
• Plane mirror laser interferometer feedback
• Active damping minimizes vibrations
• Dynamic environmental isolation

Six Axis Wafer Stepper

• High accuracy nested coplanar XY platform
• Integral Z theta, tip and tilt axes
• Custom vacuum chuck for automated wafer handling
• Plane mirror laser interferometer feedback

Thin Film Measurement Stage

• Ultra-precision stacked XY air bearing system
• Completely non-contacting design
• Magnetically preloaded air bearings, optical encoders, and
  zero-cogging linear motors
• Precision lapped, ceramic matrix structure for maximum stiffness and tight geometric tolerances

XY Theta Wafer Positioning Stage

• Three axis coplanar air bearing system (XY Theta)
• One degree theta motion via engineered flexures with dual independently driven Y axes
• Eliminates separate theta axis for wafer alignment
• Dynamic yaw and straightness compensation
• Resolution to 1 nm with 1 m/s maximum velocity via proprietary 4096x encoder multiplication

Wafer Inspection Platform

• Four-axis XYZ Theta integrated stage design
• Granite base and overhead bridge provide high stability to support inspection optics
• Compact Z Theta stages reduce weight for quick step and settle times

Wafer Inspection XY Stage

• Modular stacked air bearing stage assembly
• Integral wafer chuck
• Internal cable management

Single-axis

High Speed Product Life Test Stage

• 2000 mm travel single axis air bearing stage
• Velocity to 8 m/s
• Acceleration to 60 m/s 2
• Dual zero cogging epoxy core linear motors
• Light weight,high stiffness aluminum carriage
• Stable granite base

Hi-Resolution Computer-to-Plate (CTP) Stage

• 1000 mm travel single axis stage
• 0.01% constant velocity control
• Magnetically preloaded air bearings
• Sinusoidally commutated zero-cogging linear motor
• Completely non-contacting design