Microglide Air Bearing Positioning Systems
Microglide™ T 350
- Ceramic "T" layout provides the optimal travel-to-footprint ratio
- Coplanar XY lift air bearings decouple inter-stage reactions
- Magnetically preloaded and integrally damped air bearings ensure smooth scanning and rapid settling
- Completely non-contact design maximizes system reliability
- Platforms available for both 200 and 300 mm wafer applications
- Linear encoder or laser interferometer feedback options
- Cleanroom compatible
- Ideally suited for:
- Wafer Inspection Equipment
- Laser Machining Systems
- Electronic Assembly
Positioning Solution for 300mm Applications
The Microglide T350 single plane XY positioning system is a high performance cost-effective platform for sub-micron positioning in a production environment. State-of-the-art motion dynamics are achieved by using optically flat linear air bearings to guide the lightweight "T" shaped engineered ceramic beam. A single linear servomotor actuates the X-axis aluminum saddle directly along the ceramic beam's centerline. Two widely spaced linear servomotors work in parallel to drive the ceramic beam along the Y-axis. Angular errors of pitch and roll are minimized by the unique bearing configuration, where all lift air bearings utilize the same lapped ultra-flat granite base reference surface. Available with either high precision optical linear encoders (T350E), or plane mirror laser interferometers (T350L), the Microglide T350 motion platform can easily satisfy the different price/performance requirements encountered in semiconductor metrology and manufacturing.Innovative Anorad technology, such as sinusoidally commutated zero-cogging brushless linear servomotors and magnetically preloaded air bearings with integral damping, provides outstanding performance for both scanning and rapid settling point-to-point motion. The platform's completely non-contacting design (brushless linear servomotors, optical encoders & air bearings) makes the Microglide T350 extremely reliable, cleanroom compatible, and virtually maintenance-free.
Options include: additional rotary, vertical, tip, and tilt axes; zero-jitter air brake; fixed overhead granite bridge; support frames; vibration isolation systems; servo controllers and custom travels.
Specifications
| Performance Specification | Units | Model T350E | Model T350L |
|---|---|---|---|
| Travel 1 | mm | 350 x 350 | 350 x 350 |
| Feedback System | - | Optical Linear Encoder | Plane-Mirror Interferometer |
| Resolution | nm | 0.5 - 500 | 0.31 - 10 |
| Repeatability 3 | µm | ± 0.15 | ± 0.15 |
| Positioning Accuracy 3 | µm | ± 0.3 | ± 0.25 |
| Flatness of Travel | µm | ± 1.0 | ± 1.0 |
| Straightness of Travel | µm | ± 1.0 | ± 0.25 |
| Orthogonality | arc sec | ± 2.0 | ± 0.5 |
| Pitch, Roll and Yaw | arc sec | ± 1.0 | ± 1.0 |
| Mazimum Load Capacity 4 | kg | 50 | 50 |
| Maximum Velocity 5 | mm/s | 500 | 500 |
| Maximum Acceleration 4 | m/s 2 | 10 | 10 |
| Scanning Velocity 5 | mm/s | 350 | 350 |
| Average Velocity Ripple 6 | % | < 1.0 | < 1.0 |
| Position Stability 6 | counts | ± 1 | ± 1 |
| 25 mm Step-&-Settle Time 6 | ms | < 200 | < 200 |
Notes: Specifications are based on overall travel of each axis (significantly better positioning accuracy is possible over shorter travels) and operation in a controlled environment with Anorad approved vibration isolation system. Additional performance, travel, and configuration options are available. Contact Anorad for details.
- Additional 3 mm overtravel at each end before hard-stops.
- Resolutions available to 0.5 nm (encoder with 8192 x multiplier) or 0.31 nm (laser with l/2048 interpolation).
- After error mapping axes.
- Load based on lift bearing capacity. Applied load may determine maximum acceleration.
- Dependent upon system resolution and data rate.
- Typical dynamics for configured load, acceleration, velocity, resolution and data rate.
Carriage mounting holes are made to meet specific end user requirements. [Dimensions (mm)]
