Microglide Air Bearing Positioning Systems

T-Shaped Configuration

T 50 E

• Compact X-Y Air Bearing
• High Dynamic Performance with Linear Motor Drives
• Angular Deviations < 1 arc-sec
• Class 10 Cleanroom Operation

T 350

• Ceramic "T" layout provides the optimal travel-to-footprint ratio
• Coplanar XY lift air bearings decouple inter-stage reactions
• Magnetically preloaded and integrally damped air bearings ensure smooth scanning and rapid settling
• Completely non-contact design maximizes system reliability
• Platforms available for both 200 and 300 mm wafer applications
• Linear encoder or laser interferometer feedback options
• Cleanroom compatible
• Ideally suited for:
  • Wafer Inspection Equipment
  • Laser Machining Systems
  • Electronic Assembly