Microglide™Air Bearing Positioning Systems

"N" Type Configuration

N 250

• Open frame design for dual-sided workpiece access and fixturing
• Nested single plane XY air bearing configuration provides superior geometric accuracy
• Magnetic preload with integral damping provides smooth scanning and fast settling
• Optional granite bridge assembly for mounting overhead equipment
• Linear incremental encoder or laser interferometer feedback
• Cleanroom compatible
• Ideally suited for:
  • Optical Disk Manufacturing
  • Microelectronic Test and Inspection Equipment
  • X-Ray Lithograph

N 320

• Nested XY air bearing system with common reference plane
• Hybrid ceramic-aluminum frame reduces moving mass
• Open frame construction for doublesided workpiece access
• High resolution linear encoder or laser interferometer feedback
• Optional air brake for zero jitter stability at any fixed position
• Optional granite bridge to rigidly mount overhead tooling
• Custom engineering services to meet unique OEM specifications
• Cleanroom compatible
• Ideally suited for:
  • Semiconductor Processin
  • Flat Panel Manufacturing
  • Wafer Scanning