Microglide™ Air Bearing Positioning Systems

Hybrid Configurations

FP 720

• Single plane XY air bearing configuration provides superior geometric accuracy
• Magnetic preload with integral damping provides smooth scanning and fast settling
• Hybrid bearing system offers excellent value and performance
• Overhead beam option for mounting process equipment
• Travel to 1020 mm
• Velocities to 300 mm/s
• Linear encoder feedback
• Cleanroom compatible
• Ideally suited for:
  • Flat Panel Equipment
  • Laser Machining Systems
  • Electronic Assembly

FP 1300

• Large 1360 x 1150 mm travel for optical workpiece inspection
• Hybrid XY design maximizes value and performance
• Magnetically preloaded air bearing system on scanning axis
• Precision ground rolling element recirculating bearings on step axis
• Integral vibration damping system
• Ceramic and aluminum construction for rigidity and fast settling
• Cleanroom compatible
• Ideally for Flat Panel Inspection