Microglide™ Air Bearing Positioning Systems
Microglide™ FP720
- Single plane XY air bearing configuration provides superior geometric accuracy
- Magnetic preload with integral damping provides smooth scanning and fast settling
- Hybrid bearing system offers excellent value and performance
- Overhead beam option for mounting process equipment
- Travel to 1020 mm
- Velocities to 300 mm/s
- Linear encoder feedback
- Cleanroom compatible
- Ideally suited for:
- Flat Panel Equipment
- Laser Machining Systems
- Electronic Assembly
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Precision Solution for Flat Panel Applications
The Microglide FP720 is a single plane XY hybrid air-mechanical bearing system that provides a cost-effective solution for high precision positioning of flat panel displays. Extremely smooth motion dynamics are achieved by utilizing optically flat linear air bearings and a "T-shaped" engineered-ceramic beam with an optimized stiffness to weight ratio. A single linear servomotor actuates the preloaded air bearing X-axis aluminum saddle directly along the ceramic beam's centerline. Two widely spaced linear servomotors work in parallel to guide the ceramic beam in the Y-axis direction. Angular errors of pitch & roll are minimized by the unique air-bearing configuration, where the X-axis lift and the ceramic beam's outer-support air bearings utilize the same lapped ultra-flat granite base reference surface. High-precision optical linear encoders are available in a broad range of resolutions to satisfy the different accuracy and speed requirements typically encountered in flat panel metrology and manufacturing.Innovative Anorad engineering combines sinusoidally commutated zero-cogging brushless linear servomotors and magnetically preloaded air bearings with integral damping to deliver excellent performance in both scanning and rapid settling point-to-point motion. The primarily non-contact nature of the system makes the FP720 and FP1020 platforms extremely reliable and essentially maintenance-free.
Options include: additional rotary, vertical, tip, and tilt axes; zero-jitter air brake; fixed overhead granite bridge; support frames; vibration isolation systems; servo controllers and custom travels.
Specifications
| Performance Specification | Units | Model FP720E | Model FP1020E 7 |
|---|---|---|---|
| Travel 1 | mm | 720 x 720 | 1020 x 765 |
| Feedback System | - | Optical Linear Encoder |
Plane-Mirror Interferometer |
| Resolution 2 | nm | 0.5 0 - 500 | 0.5 0 - 500 |
| Repeatability | µm | ± 0.4 | ± 0.5 |
| Positioning Accuracy 3 | µm | ± 0.5 | ± 1.0 |
| Flatness of Travel | µm | ± 3.0 | ± 3.0 |
| Straightness of Travel | µm | ± 3.0 | ± 3.0 |
| Orthogonality | arc sec | ± 1.0 | ± 1.0 |
| Pitch, Roll and Yaw | arc sec | ± 2.0 | ± 3.0 |
| Mazimum Load Capacity 4 | kg | 80 | 80 |
| Maximum Velocity 5 | mm/s | 500 | 500 |
| Maximum Acceleration 4 | m/s 2 | 10 | 10 |
| Scanning Velocity range 5 | mm/s | 350 | 350 |
| Average Velocity Ripple 6 | % | < 1.5 | < 1.5 |
| Position Stability 6 | counts | ± 2 | ± 2 |
| 25 mm Step-&-Settle Time 6 | ms | < 450 | < 450 |
Notes: Specifications are based on overall travel of each axis (significantly better positioning accuracy is possible over shorter travels) and operation in a controlled environment with Anorad approved vibration isolation system. Additional performance, travel, and configuration options are available. Contact Anorad for details.
- Additional 3 mm overtravel at each end before hard-stops.
- Resolution available to 0.5nm (8192x encoder multiplier).
- After error mapping axes.
- Load based on lift bearing capacity. Applied load may determine maximum acceleration.
- Dependent upon system resolution and data rate.
- Typical dynamics for configured load, acceleration, velocity, resolution and data rate.
- FP1020 dimensions [in square parenthesis].
