Microglide™ Air Bearing Positioning Systems
Microglide FP1300
- Large 1360 x 1150 mm travel for optical workpiece inspection
- Hybrid XY design maximizes value and performance
- Magnetically preloaded air bearing system on scanning axis
- Precision ground rolling element recirculating bearings on step axis
- Integral vibration damping system
- Ceramic and aluminum construction for rigidity and fast settling
- Cleanroom compatible
- Ideally for Flat Panel Inspection
Precision Solution for Large Workpiece Inspection
Anorad's Microglide FP1300 is a high capacity positioning system designed for optical inspection of large flat panel displays. Its hybrid design combines the ultra smooth velocity control of air bearings with the high rigidity of precision ground recirculating bearings. The result is a high performance system that is smooth enough to handle scanning applications yet responsive enough to achieve fast point-to-point indexing moves. The system has a load capacity of 80 kg, an X-axis travel of up to 1360 mm, and fits within an area of only 2.2 x 2.9 meters.The hybrid XY configuration consists of an upper scanning X-axis mounted on a lower stepping Y-axis. The scanning axis features a sturdy aluminum carriage that smoothly glides along a rigid engineered-ceramic beam. The carriage is magnetically preloaded and supported by lift, and guide air bearings, which reference optically flat surfaces ground along the length of the beam. The lightweight ceramic beam is mounted to the lower stepping axis via four preloaded carriages, that accurately track along a pair of precision ground linear rails. Both the X and Y axes are actuated by Anorad's patented linear servo motors, and receive feedback via linear incremental optical encoders with 40 nm resolution. The zero-cogging brushless linear servo motors act along the centerline of each axis, and are sinusoidally commutated to maximize smooth scanning performance.
Optional features of the Microglide FP1300 include: a rigid granite bridge with 200 kg capacity for mounting overhead optics; passive or active vibration isolation systems; optional Z, theta, tip and tilt axes; and XY error mapping for one-micron absolute positioning accuracy.
Specifications
| Performance Specification | Units | Model FP1300 |
|---|---|---|
| Travel 1 (X-Y) | mm | X = 1360 Y = 1150 |
| Feedback System | - | Optical Linear Encoder |
| Resolution 2 | nm | 0.5 - 500 |
| Repeatability | µm | ± 2.0 X ± 1.0 Y |
| Positioning Accuracy 3 | µm | ± 5.0 X ± 4.0 Y |
| Flatness of Travel | µm | ± 8.0 X ± 5.0 Y |
| Straightness of Travel | µm | ± 5.0 X ± 4.0 Y |
| Orthogonality | arc sec | ± 3.0 |
| Pitch, Roll and Yaw | arc sec | ± 5.0, ± 5.0, ± 5.0 |
| Maximum Load Capacity 4 | kg | 80 |
| Maximum Velocity 5 | mm/s | 500 |
| Maximum Acceleration 4 | m/s 2 | 10 |
| Scanning Velocity 5 | mm/s | 300 |
| Average Velocity Ripple 6 | % | ± 2.0 |
| Position Stability 6 | µm | ± 2 |
Specifications are based on overall travel of each axis (significantly better positioning accuracy is possible over shorter travels) and operation in a controlled environment with Anorad approved vibration isolation system. Additional performance, travel, and configuration options are available. Contact Anorad for details.
- Additional 3 mm overtravel at each end before hard-stops.
- Resolutions available to 0.5 nm (8192 x encoder multiplier).
- Higher accuracy possible with error mapping.
- Load based on lift bearing capacity. Applied load may determine maximum acceleration.
- Dependent upon system resolution and data rate.
- Typical dynamics for configured load, acceleration, velocity, resolution and data rate.
