Microglide™ Air Bearing Positioning Systems
Anorad's Microglide platforms feature precisely engineered air bearing systems. These ultra-smooth bearings glide on a pressurized thin film of air to support an applied normal load. Repeatable precision is achieved by maintaining a constant air gap, only microns thick, using a variety of highly stable preloading techniques. Since air bearings distribute their load over a relatively large and extremely flat area, they have built-in averaging effect that compensates for any minor irregularities in the reference surface. This enables extremely accurate, virtually frictionless motion, for extraordinary control of precision positioning and scanning processes.
Anorad's Microglide systems offer many configuration and feedback options to solve a diverse set of applications.
The "T" shaped configurations deliver high performance and great value. Combining an engineered-ceramic beam and air bearing technology produces a precise, non-contacting positioning system, with the optimal arrangement of components for repeatable sub-micron performance.
The nested "N" type configurations employ a frame-in-frame design. This enables full access to both sides of a workpiece fixtured to the innermost frame. The nested systems use a variety of air bearing preload methods to maintain extremely high accuracy, even in travels up to 320 mm.
The hybrid configurations provide a cost-effective solution for step and scan motion profiles typically encountered in inspection applications. The lower (Y) axis takes discrete short steps, supported by precision ground recirculating ball linear bearings. The upper (X) axis glides on a set of Anorad air bearings, to perform extremely smooth scanning moves with negligible velocity ripple and vibration.
In addition to the configurations already mentioned, Anorad manufactures custom, engineered-to-order, air bearing systems to meet unique OEM requirements. These exemplify the creativity and know-how that establish Anorad as the world's premier manufacturer of sub-micron accuracy air bearing positioning systems.
"T" Type Configuration
"N" Type Configuration
Hybrid Configurations