Orthogonality

Orthogonality — The degree to which stages are aligned with their motion at right angles to one another. Motion of an X-Y system is typically 90° apart in a single plane. X-Y-Z systems are all mutually at a 90° relationship in a 3D space. The specification is typically the angle measured between the best-fit-straight-line of X-axis motion and the best-fit-straight-line of Y-axis motion, where a best-fit-straight-line is the average straight line of all measured points along a measurement’s surface.